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Microelectronics processing : inorganic materials characterization / Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society.

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Material type: Text

TextSeries: ACS symposium series ; 295Publication details: Washington, DC American Chemical Society 1986.Description: x, 443 p. ill. 24 cmISBN:

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Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode
Vypožičateľné	Slovenská chemická knižnica (I)	Dar	schkA2005/98353	Available		schkA2005/98353

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