Microelectronics processing : inorganic materials characterization /
Microelectronics processing : inorganic materials characterization /
Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society.
- Washington, DC American Chemical Society 1986.
- x, 443 p. ill. 24 cm.
- ACS symposium series 295 0097-6156 ; .
Includes bibliographies and indexes.
0841209340
85-030648
Microelectronics--Materials--Congresses.
621.381/7
Includes bibliographies and indexes.
0841209340
85-030648
Microelectronics--Materials--Congresses.
621.381/7