MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01212pam a2200289 a 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
050412s1986 dcua b 101 0 eng |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
|---|
| LC control number |
85-030648 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0841209340 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
vtls001523430 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(DLC) 85030648 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
()499292 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
200504121215 |
| Level of effort used to assign nonsubject heading access points |
mschk03 |
| Level of effort used to assign subject headings |
200504121102 |
| Level of effort used to assign classification |
mschk03 |
| -- |
200504121049 |
| -- |
mschk03 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
STUSCHK1 |
| Language of cataloging |
slo |
| Transcribing agency |
STUSCHK1 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.381/7 |
| Edition number |
19 |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Microelectronics processing : |
| Remainder of title |
inorganic materials characterization / |
| Statement of responsibility, etc. |
Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Washington, DC |
| Name of publisher, distributor, etc. |
American Chemical Society |
| Date of publication, distribution, etc. |
1986. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
x, 443 p. |
| Other physical details |
ill. |
| Dimensions |
24 cm. |
| 440 #0 - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
ACS symposium series |
| International Standard Serial Number |
0097-6156 ; |
| Volume/sequential designation |
295 |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographies and indexes. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronics |
| General subdivision |
Materials |
| -- |
Congresses. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Casper, L. A. |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
|---|
| Corporate name or jurisdiction name as entry element |
American Chemical Society. |
| Subordinate unit |
Division of Industrial and Engineering Chemistry |
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) |
|---|
| a |
7 |
| b |
cbc |
| c |
orignew |
| d |
1 |
| e |
ocip |
| f |
19 |
| g |
y-gencatlg |
| 910 ## - USER-OPTION DATA (OCLC) |
|---|
| User-option data |
SCHK95 |
| 919 ## - |
|---|
| -- |
0-8412-0934-0 |
| 991 ## - |
|---|
| -- |
c-GenColl |
| -- |
TK7874 |
| -- |
.M486 1986 |
| -- |
Copy 1 |
| -- |
BOOKS |
