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	1.	Introduction to microlithography / edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden. by Thompson, L. F, 1944- Willson, C. G. (C. Grant), 1939- Bowden, M. J, 1943- Series: ACS professional reference book Edition: 2nd ed. Material type: Text; Format: print ; Literary form: Not fiction Publication details: Washington, DC American Chemical Society 1994 Availability: Items available for loan: Slovenská chemická knižnica (I) (1)Call number: schkA2005/98570. Place hold Add to cart (remove)
	2.	Polymers for microelectronics resists and dielectrics / Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor. by Thompson, L. F, 1944- Willson, C. G. (C. Grant), 1939- Tagawa, Seiichi American Chemical Society. Division of Polymeric Materials: Science and Engineering American Chemical Society. Meeting (203. : 1992 : San Francisco, Calif.) Series: ACS symposium series ; 0097-6156 ; Material type: Text; Format: print ; Literary form: Not fiction Publication details: Washington, DC American Chemical Society 1994 Availability: Items available for loan: Slovenská chemická knižnica (I) (1)Call number: schkA2005/98616. Place hold Add to cart (remove)

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