Introduction to microlithography / edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden.
Material type:
TextSeries: ACS professional reference bookPublication details: Washington, DC American Chemical Society 1994.Edition: 2nd edDescription: xiv, 527 p. ill. 24 cmISBN: - 0841228485 (alk. paper)
- 621.3815/31 20
Contents:
An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil.
| Item type | Current library | Collection | Call number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
| Vypožičateľné | Slovenská chemická knižnica (I) | Dar | schkA2005/98570 | Available | schkA2005/98570 |
Includes bibliographical references and index.
An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil.