MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01624cam a2200373 a 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
050512s1994 dcua b 101 0 eng |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
|---|
| LC control number |
93-042023 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0841228485 (alk. paper) |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
vtls008153616 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
4416811 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| -- |
200505121357 |
| -- |
mschk03 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
STUSCHK1 |
| Language of cataloging |
slo |
| Transcribing agency |
STUSCHK1 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.3815/31 |
| Edition number |
20 |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Introduction to microlithography / |
| Statement of responsibility, etc. |
edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden. |
| 250 ## - EDITION STATEMENT |
|---|
| Edition statement |
2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Washington, DC |
| Name of publisher, distributor, etc. |
American Chemical Society |
| Date of publication, distribution, etc. |
1994. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xiv, 527 p. |
| Other physical details |
ill. |
| Dimensions |
24 cm. |
| 440 #0 - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
ACS professional reference book |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index. |
| 505 0# - FORMATTED CONTENTS NOTE |
|---|
| Formatted contents note |
An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microlithography |
| General subdivision |
Congresses. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Photoresists |
| General subdivision |
Congresses. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Plasma etching |
| General subdivision |
Congresses. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors |
| General subdivision |
Etching |
| -- |
Congresses. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Thompson, L. F., |
| Dates associated with a name |
1944- |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Willson, C. G. |
| Fuller form of name |
(C. Grant), |
| Dates associated with a name |
1939- |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Bowden, M. J., |
| Dates associated with a name |
1943- |
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) |
|---|
| a |
7 |
| b |
cbc |
| c |
orignew |
| d |
1 |
| e |
ocip |
| f |
19 |
| g |
y-gencatlg |
| 910 ## - USER-OPTION DATA (OCLC) |
|---|
| User-option data |
SCHK95 |
| 919 ## - |
|---|
| -- |
0-8412-2848-5 |
| 991 ## - |
|---|
| -- |
c-GenColl |
| -- |
TR940 |
| -- |
.I57 1994 |
| -- |
Copy 1 |
| -- |
BOOKS |
| 991 ## - |
|---|
| -- |
c-GenColl |
| -- |
TR940 |
| -- |
.I57 1994 |
| -- |
00015271966 |
| -- |
Copy 2 |
| -- |
CCF |
