Plasma deposition, treatment, and etching of polymers /
Plasma deposition, treatment, and etching of polymers /
edited by Riccardo d'Agostino.
- Boston Academic Press c1990.
- xiii, 528 p. ill. 24 cm.
- Plasma--materials interactions .
Includes bibliographical references and index.
0122004302 (acidfree paper)
89-018267
Polymers.
Plasma engineering.
Plasma etching.
Plasma polymerization.
668.9
Includes bibliographical references and index.
0122004302 (acidfree paper)
89-018267
Polymers.
Plasma engineering.
Plasma etching.
Plasma polymerization.
668.9