| 000 | 01840cam a2200349 a 4500 | ||
|---|---|---|---|
| 008 | 171201s1995 dcua b 101 0 eng | ||
| 010 | _a95-044669 | ||
| 020 |
_a0841233322 _q(acid-free paper) |
||
| 035 | _avtls001563509 | ||
| 035 | _a2089474 | ||
| 039 | 9 |
_a201712011441 _bVLOAD _y200505031539 _zmschk03 |
|
| 040 |
_aSTUSCHK1 _bslo _cSTUSCHK1 |
||
| 082 | 0 | 0 |
_a621.381/046 _220 |
| 245 | 0 | 0 |
_aMicroelectronics technology : _bpolymers for advanced imaging and packaging : developed from a symposium sponsored by the ACS Division of Polymeric Materials: Science and Engineering, Inc., and the Polymers for Microelectronics Division of the Society of Polymer Science, Japan, at the 209th National Meeting of the American Chemical Society, Anaheim, California, April 2-6, 1995 / _cElsa Reichmanis ... [et al., editors]. |
| 260 |
_aWashington, DC _bAmerican Chemical Society _c1995. |
||
| 300 |
_axii, 563 p. _bill. _c24 cm. |
||
| 440 | 0 |
_aACS symposium series _v614 |
|
| 504 | _aIncludes bibliographical references and indexes. | ||
| 650 | 0 |
_aMicroelectronic packaging _xMaterials _xCongresses. |
|
| 650 | 0 |
_aPolymers _xCongresses. |
|
| 650 | 0 |
_aPhotoresists _xCongresses. |
|
| 700 | 1 |
_aReichmanis, Elsa, _d1953- |
|
| 710 | 2 |
_aAmerican Chemical Society. _bDivision of Polymeric Materials: Science and Engineering |
|
| 710 | 2 |
_aKobunshi Gakkai (Japan). _bPolymers for Microelectronics Division. |
|
| 710 | 2 |
_aAmerican Chemical Society. _bMeeting _n(209. : _d1995 : _cAnaheim, Calif.) |
|
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
||
| 910 | _aSCHK95 | ||
| 919 | _a0-8412-3332-2 | ||
| 920 | _a** LC HAS REQ'D # OF SHELF COPIES ** | ||
| 991 |
_bc-GenColl _hTK7874 _i.M475 1995 _tCopy 1 _wBOOKS |
||
| 999 |
_c8159 _d8159 |
||