| 000 | 01212pam a2200289 a 4500 | ||
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| 008 | 050412s1986 dcua b 101 0 eng | ||
| 010 | _a85-030648 | ||
| 020 | _a0841209340 | ||
| 035 | _avtls001523430 | ||
| 035 | _a(DLC) 85030648 | ||
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_a621.381/7 _219 |
| 245 | 0 | 0 |
_aMicroelectronics processing : _binorganic materials characterization / _cLawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society. |
| 260 |
_aWashington, DC _bAmerican Chemical Society _c1986. |
||
| 300 |
_ax, 443 p. _bill. _c24 cm. |
||
| 440 | 0 |
_aACS symposium series _x0097-6156 ; _v295 |
|
| 504 | _aIncludes bibliographies and indexes. | ||
| 650 | 0 |
_aMicroelectronics _xMaterials _xCongresses. |
|
| 700 | 1 | _aCasper, L. A. | |
| 710 | 2 |
_aAmerican Chemical Society. _bDivision of Industrial and Engineering Chemistry |
|
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
||
| 910 | _aSCHK95 | ||
| 919 | _a0-8412-0934-0 | ||
| 991 |
_bc-GenColl _hTK7874 _i.M486 1986 _tCopy 1 _wBOOKS |
||
| 999 |
_c10240 _d10240 |
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