TY  - BOOK
AU  - Bowden,M.J.
AU  - Turner,S.Richard
ED  - American Chemical Society.
ED  - American Chemical Society.
TI  - Polymers for high technology: electronics and photonics 
SN  - 0841214069
U1  - 668.9 19
PY  - 1987///
CY  - Washington, DC
PB  - The Society
KW  - Polymers
KW  - Congresses
KW  - Photoresists
KW  - Microlithography
KW  - Materials
KW  - Microelectronics
N1  - Includes bibliographies and indexes
ER  -