TY  - BOOK
AU  - Casper,L.A.
ED  - American Chemical Society.
TI  - Microelectronics processing: inorganic materials characterization 
SN  - 0841209340
U1  - 621.381/7 19
PY  - 1986///
CY  - Washington, DC
PB  - American Chemical Society
KW  - Microelectronics
KW  - Materials
KW  - Congresses
N1  - Includes bibliographies and indexes
ER  -